磁控溅射金刚石微粉表面镀镍及其在电镀金刚石线锯上的应用
Nicoatingonsurfaceofdiamondmicroparticlesbymagnetronsputteringmethodforenhancedperformanceofdiamondwire
摘要：为了增强电镀金刚石线锯对金刚石颗粒的把持力,提高金刚石线锯寿命,使金刚石颗粒与电镀金属更好地结合,通过振动辅助的摇摆式样品台将金刚石微粉充分分散,使用磁控溅射方法在粒径为30~40μm的金刚石微粉表面镀附金属镍,利用其制备电镀金刚石线锯,借助光学显微镜(OM)、扫描电子显微镜(SEM)、能量色散X射线光谱仪(EDX)对制备的镀镍金刚石颗粒和电镀金刚石线锯进行形貌和成分表征,研究不同溅射和电镀条件对实验结果的影响;通过自制切割实验装置对比金属化前后的金刚石微粉制备的金刚石线锯对金刚石的把持力。结果表明:磁控溅射表面镀镍能增强电镀金属与金刚石表面的结合,切割试验后金刚石脱落量相比原始金刚石明显从17.4%减少到4.9%。
关键词：金刚石微粉；金刚石线锯；磁控溅射；表面金属化；颗粒把持力
Abstract：Inordertoimprovetheabrasiveretentivelyofelectroplateddiamondwireandincreaseitsdurability,diamondmicroparticleswerecoatedwithNibymagnetronsputteringmethodtoenhancethebindingbetweendiamondandelectroplatedmetal.Withaswingsamplevesselassistedbyvibrationgenerator,diamondmicroparticles(30~40μm)werefullydispersedtobedepositedwithNibeforeaffixedtodiamondwire.SurfacecharacterizationandcompositionoftheNi-coateddiamondmicroparticlesandelectroplateddiamondwireswereconductedbyOM,SEMandEDX.Influencesofdifferentexperimentalconditionsduringsputteringandelectroplatingwereevaluated.Contrastcuttingexperimentswerecarriedouttostudytheabrasiveretentivity.TheresultsshowthatdiamondmicroparticleswithmagnetronsputteringNicoatingpossessstrongerinterfacewithelectroplatedmetal.ContrastcuttingexperimentsshowdiamondswithNicoatingsuffermuchlessdiamondloss(4.9%)comparedtothosewithoutcoating(17.4%).
Keywords:diamondmicroparticles；diamondwire；magnetronsputtering；surfacemetallization；abrasiveretentivity